| | | | | | | | | | | 50 | | | | | | | | | | | 700 680 | | 800 | | | | 2021 | 1000 1500 | | 2020 2016 | | | | | | | 50 | | | | | | | | 2020 4 1 | | | | | | | | 0.01 mm | | | 1 | 3000 | 2000 | 4000 100 | 40 | 20 | | 200 | | | | | | | | | | |